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AssigneeSamsung Electro-Mechanics Co., Ltd.
InventorsKyo-yeol Lee, Tae-kyun Lee, Jae-woo Chung, Hwa-sun Lee, Seung-mo Lim
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A method to form a thick layer by screen printing and a method to form a piezoelectric actuator of an inkjet head. The method to form the thick layer including forming a guide groove in a surface to a predetermined depth, and forming the thick layer by applying a material to the surface inside the guide groove through screen printing. The method to form the piezoelectric actuator including forming an insulating layer on a top surface of a vibration plate and forming a guide groove in the top surface of the vibration plate or an insulating layer to a predetermined depth at a position corresponding to each of a plurality of pressure chambers, forming a lower electrode on the top surface of the insulating layer; forming a piezoelectric layer inside the guide groove by screen printing, and forming an upper electrode on a top surface of the piezoelectric layer.
A piezoelectric inkjet head comprising:
A piezoelectric actuator unit of an inkjet head having a flow channel plate with a plurality of pressure chambers, a vibration plate having an insulating layer formed thereon to cover the plurality of pressure chambers, and a plurality of nozzles corresponding to the pressure chambers, the piezoelectric actuator unit comprising:
Dependencies are inferred from the claim text.