Beam optical component for charged particle beams

A charged particle beam device comprising a beam optical component, the beam optical component comprising:

• a first element having a first opening for acting on said charged particle beam;
• at least one second element for acting on said charged particle beam;
• a first distance piece positioned between said first element and said at least one second element to provide for a minimum distance between said first element and said second element;
• and
• a first holding piece for abutting said first element to said first distance piece, wherein said first holding piece is directly attached to said first distance piece.

A beam optical component for acting on a charged particle beam, comprising:

• a first element having a first opening for acting on said charged particle beam;
• at least one second element for acting on said charged particle beam;
• a first distance piece positioned between said first element and said at least one second element to provide for a minimum distance between said first element and said second element;
• a first holding piece for abutting said first element to said first distance piece, wherein said first holding piece is directly attached to said first distance piece;
• at least one third element having a second structured portion to be aligned to the first opening;
• and
• a second distance piece to define a minimum distance between the second element and the third element.