Method and structure for fabricating multiple tiled regions onto a plate using a controlled cleaving process
AssigneeSilicon Genesis Corporation
InventorFrancois J. Henley
Life of this patent
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Abstract
A reusable transfer substrate member for forming a tiled substrate structure. The member including a transfer substrate, which has a surface region. The surface region comprises a plurality of donor substrate regions. Each of the donor substrate regions is characterized by a donor substrate thickness and a donor substrate surface region. Each of the donor substrate regions is spatially disposed overlying the surface region of the transfer substrate. Each of the donor substrate regions has the donor substrate thickness without a definable cleave region.
Claims18
A method for forming a solar cell comprising a plurality of tile structures on a substrate member, the method comprising:
- providing a transfer substrate, the transfer substrate having a surface region, the surface region supporting a plurality of separate tiled donor substrates, each of the tiled donor substrates being characterized by a tile edge, a donor substrate thickness and a donor substrate surface region having a surface area corresponding to an entire processed semiconductor substrate, each of the tiled donor substrates being spatially disposed overlying the surface region of the transfer substrate;
- implanting a plurality of particles concurrently through two or more of the donor substrate surface regions supported on the transfer substrate to form a cleave region provided by the plurality of particles between a portion of the donor substrate thickness and the donor substrate surface region for the two or more tiled donor substrates;
- and
- joining each of the donor substrate surface regions to a handle substrate surface region, the handle substrate surface region being provided from a handle substrate;
- removing the transfer substrate from the handle substrate to separate along a cleave plane of the cleave region, a plurality of tiled donor substrate portions spatially disposed overlying the handle substrate surface region;
- and
- incorporating the plurality of tiled donor substrate portions into a solar cell structure offering a sufficient photovoltaic surface area to convert solar energy into electrical power.
A method for forming a solar cell comprising a plurality of tile structures on a substrate member, the method comprising:
- providing a transfer substrate, the transfer substrate having a surface region, the surface region supporting a plurality of separate tiled donor substrates, each of the tiled donor substrates being characterized by a tile edge, a donor substrate thickness and a donor substrate surface region having a surface area corresponding to an entire processed semiconductor substrate, each of the tiled donor substrates being spatially disposed overlying the surface region of the transfer substrate;
- processing the donor substrate regions provided on the transfer substrate concurrently to form a cleave region between a portion of the donor substrate thickness and the donor substrate surface region for each of the tiled donor substrates;
- and
- joining each of the donor substrate surface regions to a handle substrate surface region, the handle substrate surface region being provided from a handle substrate;
- removing the transfer substrate from the handle substrate to separate along a cleave plane of the cleave region, a plurality of tiled donor substrate portions spatially disposed overlying the handle substrate surface region;
- and
- incorporating the plurality of tiled donor substrate portions into a solar cell structure offering a sufficient photovoltaic surface area to convert solar energy into electrical power.
Dependencies are inferred from the claim text.