Vaporizer and various devices using the same and an associated vaporizing method

A vaporization method, the vaporization method comprising the steps of:

• introducing raw material solution into a gas passage, shearing/atomizing the raw material solution by jetting a carrier gas including oxygen to the introduced raw material solution to obtain raw material mist;
• supplying the raw material mist to a vaporization part for making it vaporize;
• and
• controlling the temperature of the raw materials solution, a helium forced feed container, and a liquid mass flow controller, and pipings before and behind to a given temperature.

A film forming method comprising the steps of:

• introducing a carrier gas into a gas passage from a gas inlet;
• introducing one or more raw material solutions in the carrier gas in the gas passage to obtain a raw material mist;
• supplying the raw material mist to into a vaporizing part from a jet port to obtain a material gas;
• introducing an oxidizing gas into the material gas;
• and
• supplying the material gas including the oxidizing gas into a film forming chamber,
• wherein another oxidizing gas is introduced from the gas inlet or the jet port.