Separation apparatus and method
AssigneeObducat AB
InventorsBabak Heidari, Mattias Habenicht
Life of this patent
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Abstract
An apparatus and method are provided for separating two objects attached to each other in a sandwich structure, such as a stamp and a substrate pressed together in an imprint process. The apparatus includes a support structure, carrying first fastening means having a base surface and first gripping means for supporting and holding a first object, second fastening means, positioned opposite to the first fastening means, having second gripping means for holding a second object, and a pulling force mechanism to provide a pulling force at an angle to the normal direction of the base surface for displacing the two fastening means away from each other. Preferably, the second object is gripped at a periphery portion, and the pulling force is angled inwardly from said periphery portion.
Claims10
Apparatus for separating two objects attached to each other in a sandwich structure, comprising:
- a support structure, carrying
- a first fastening member having a base surface and a first gripping member for supporting and holding a first object,
- a second fastening member, positioned opposite to the first fastening member, having a second gripping member for holding a second object by suction force to a surface of the second object facing away from the first object,
- wherein the first and second gripping members each comprise a seal and an aperture located on the inner side of the seal connected to a vacuum supply system for gripping an object surface by suction,
- the first and second fastening members being positioned one over the other, and the seal of the uppermost fastening member enclosing a smaller area than the seal of the lowermost fastening member,
- wherein the same vacuum pressure is provided to both apertures;
- and
- a pulling force mechanism devised to provide a pulling force at an angle to the normal direction of the base surface for displacing the two fastening members away from each other.
Method for separating two objects attached to each other in a sandwich structure, comprising the steps of:
- gripping and holding a first object to a base surface by means of a first fastening member,
- gripping a second object by means of a second fastening member, positioned opposite to the first fastening member by suction force to a surface of the second object facing away from the first object, and
- providing a pulling force at an angle to the normal direction of the base surface for displacing the two fastening members away from each other,
- wherein the first and second fastening members each comprise a seal and an aperture located on the inner side of the seal, comprising the step of:
- providing a vacuum suction force to said apertures for gripping respective outer object surfaces of the sandwich structure,
- wherein the first and second fastening members are positioned one over the other, and the seal of the uppermost fastening member encloses a smaller area than the seal of the lowermost fastening member, comprising the additional step of:
- providing the same vacuum pressure to both apertures.
Dependencies are inferred from the claim text.