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US 7,668,615 B2Granted
Method and apparatus for randomizing dispatch order for single wafer processing
AssigneeGlobalfoundries Inc.
InventorsGerald L. Goff, Leslie Marshall, Donald C. Likes
Life of this patent
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Abstract
A method for dispatching wafers for processing in a tool includes identifying a queue of wafers available to be processed in the tool. One of the wafers is randomly selected based at least in part on a length of time each wafer has been in the queue. The selected wafer is dispatched for processing in the tool.
Claims17
A method for dispatching wafers for processing in a tool, comprising:
- identifying a queue of wafers available to be processed in the tool;
- randomly selecting one of the wafers based at least in part on a length of time each wafer has been in the queue;
- and
- dispatching the selected wafer for processing in the tool.
1 more element
A manufacturing system, comprising:
- a tool operable to process wafers;
- a workflow unit operable to identify a queue of wafers available to be processed in the tool, randomly select one of the wafers based at least in part on a length of time each wafer has been in the queue, and dispatch the selected wafer for processing in the tool.
A system, comprising:
- means for identifying a queue of wafers available to be processed in a tool;
- means for randomly selecting one of the wafers based at least in part on a length of time each wafer has been in the queue;
- and
- means for dispatching the selected wafer for processing in the tool.
1 more element
Dependencies are inferred from the claim text.