MEMS nanoindenter

A nanoindentation system for use in a transmission electron microscope, said nanoindentation system comprising:

• a force sensor fabricated in a micro machined process, said force sensor including:
• a. a membrane movable in relation to a bulk structure;
• b. at least one detection element in a detection structure in connection with said bulk structure;
• and
• c. connectors for connecting said force sensor to electronics;
• wherein said membrane is attached to said bulk structure through at least one spring, said membrane includes a probe holding structure, said at least one spring provides said membrane with movement capabilities in at least one direction with respect to said bulk structure;
• and said movement is measured using said at least one detection element;
• a nanoindentation probe mounted on said force sensor;
• a displacement device;
• and
• a sample holding structure;
• wherein said force sensor, nanoindentation probe, displacement device, and sample holding structure are mounted on a transmission electron microscopy (TEM) sample holder, and said sample holding structure and nanoindentation probe are movable in relation to each other.