# US 7,653,237 B2 · Method of manufacturing ball array devices using an inspection apparatus having two or more cameras and ball array devices produced according to the method > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 7,653,237 B2 - Document ID: US7653237B2 - Status: Granted - Kind: B2 - Application number: 11/735,982 - Filed: 2007-04-16 - Published: 2007-08-09 - Granted: 2010-01-26 - Earliest claimed: 1998-01-16 - Assignees: Scanner Technologies Corporation - Inventors: Elwin M. Beaty; David P. Mork - Web page: https://patentgrep.com/patent/US7653237B2 ## CPC - G01N 21/95684: {Patterns showing highly reflecting parts, e.g. metallic elements} - G06T 7/0002: {Inspection of images, e.g. flaw detection} - G06T 7/0004: {Industrial image inspection} - G06T 7/70: Determining position or orientation of objects or cameras (camera calibration G06T7/80) - G06T 7/80: Analysis of captured images to determine intrinsic or extrinsic camera parameters, i.e. camera calibration - G06V 10/147: Details of sensors, e.g. sensor lenses (fingerprint or palmprint sensors G06V40/13; vascular sensors G06V40/145; eye sensors G06V40/19) - H05K 13/0818: {Setup of monitoring devices prior to starting mounting operations; Teaching of monitoring devices for specific products; Compensation of drifts during operation, e.g. due to temperature shifts} - G01N 2021/95661: {for leads, e.g. position, curvature} - G06T 2207/30152: Solder - G06T 2207/30244: Camera pose - H04N 13/218: using spatial multiplexing - H04N 13/246: Calibration of cameras - H04N 2013/0081: {Depth or disparity estimation from stereoscopic image signals} - G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q) - G06T: IMAGE DATA PROCESSING OR GENERATION, IN GENERAL - G06V: IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING - H05K: PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS - H04N: PICTORIAL COMMUNICATION, e.g. TELEVISION ## Abstract A calibration and part inspection method for the inspection of ball grid array, BGA, devices. Two cameras image a precision pattern mask with dot patterns deposited on a transparent reticle. The precision pattern mask is used for calibration of the system. A light source and overhead light reflective diffuser provide illumination. A first camera images the reticle precision pattern mask from directly below. An additional mirror or prism located below the bottom plane of the reticle reflects the reticle pattern mask from a side view, through prisms or reflective surfaces, into a second camera and a second additional mirror or prism located below the bottom plane of the reticle reflects the opposite side view of the reticle pattern mask through prisms or mirrors into a second camera. By imaging more than one dot pattern the missing state values of the system can be resolved using a trigonometric solution. The reticle with the pattern mask is removed after calibration and the BGA to be inspected is placed with the balls facing downward, in such a manner as to be imaged by the two cameras. The scene of the part can thus be triangulated and the dimensions of the BGA are determined. ## Claims ### Claim 1 A method of manufacturing a ball array device having a plurality of leads, the method comprising: providing a fixed optical imaging system comprising at least two cameras; calibrating the fixed optical imaging system with a planar precision pattern disposed in a fixed position; obtaining a single bottom view image of the leads using the calibrated system; obtaining a single side view image of the leads using the calibrated system; calculating an inspection result by combining information from the single bottom view image and the single side view image; and selecting the ball array device as a manufactured product using the calculated inspection result. ### Claim 2 (depends on 1) The method of claim 1, wherein the ball array device is selected from the group consisting of: ball grid array, ball grid array socket, bump on wafer, ceramic ball grid array, chip array ball grid array, chip scale product, flip chip ball grid array, flip chip scale product, high performance ball grid array, land grid array, land grid array socket, leadless chip carrier, micro lead frame, plastic ball grid array, super ball grid array, super flip chip, system in a package, and thin chip array ball grid array. ### Claim 3 (depends on 1) The method of claim 1, wherein the plurality of leads is selected from the group consisting of: bumps, balls, columns, contacts, pads, pins, towers, posts, micro-pins, and pedestals. ### Claim 4 (depends on 1) The method of claim 1, wherein the fixed optical imaging system comprises at least two cameras, at least one lens, at least one illumination source, at least one processor and memory. ### Claim 5 (depends on 1) The method of claim 1, wherein the fixed optical imaging system comprises two cameras, optics, illumination and a computer. ### Claim 6 (depends on 1) The method of claim 1, wherein the planar precision pattern is selected from the group consisting of: calibration reticle, precision pattern that is generally planar, precision pattern of fiducials disposed on a generally planar surface, precision pattern on a metal surface and precision pattern on a glass surface. ### Claim 7 (depends on 1) The method of claim 1, wherein the information from the single bottom view image and the single side view image is selected from the group consisting of: a subpixel position of the center of a donut shaped reflection, a subpixel position of the center of a crescent shaped reflection, a subpixel position of the top of a crescent shaped reflection, a subpixel position of the center of an ellipse shaped reflection, a subpixel position of the top of an ellipse shaped reflection, a Db displacement in the single bottom view image, a Ds displacement in the single side view image, a world location, and a subpixel location relative to the stored locations of at least three calibration fiducials. ### Claim 8 (depends on 1) The method of claim 1, wherein the inspection result is selected from the group consisting of: pass, rework, invalid, not found, reject and fail. ### Claim 9 (depends on 1) The method of claim 1, wherein the manufactured product is selected from the group consisting of: finished good, assembled ball array device, finished ball array device, accepted ball array device, ball array device ready for packaging, ball array device ready for shipping, and ball array device ready to be passed on to a subsequent manufacturing step. ### Claim 10 (depends on 1) The method of claim 1, wherein calculating an inspection result comprises calculating a Z value for each of the leads. ### Claim 11 (depends on 1) The method of claim 1, wherein calculating an inspection result comprises calculating a coplanarity value for each of the leads. ### Claim 12 (depends on 1) The method of claim 1, wherein calculating an inspection result comprises calculating a coplanarity value for each lead, calculating a maximum coplanarity value, and comparing the maximum coplanarity value to a predetermined tolerance value. ### Claim 13 (depends on 1) The method of claim 1, wherein selecting the ball array device comprises providing a result signal to a part handler based upon the inspection result. ### Claim 14 (depends on 1) The method of claim 1, wherein selecting the ball array device comprises selecting the ball array device as an acceptable device to be passed to a subsequent manufacturing step based upon the inspection result. ### Claim 15 (depends on 1) An electronic product comprising the ball array device manufactured by the method of claim 1 wherein the electronic product is selected from the group consisting of: automotive controller, personal computer, digital camera, graphics board, memory device, motherboard, music player, networking device, telephone, cell phone, television, video game console and video player. ### Claim 16 A method of manufacturing a ball array device having a plurality of leads, the method comprising: providing a fixed optical imaging system comprising at least two cameras; calibrating the fixed optical imaging system with a planar precision pattern disposed in a fixed focus position; obtaining a bottom view image comprising donut shaped reflections from the leads using the calibrated system; obtaining a side view image comprising crescent shaped reflections from the leads using the calibrated system; finding locations of the donut shaped reflections from the leads; finding locations of the crescent shaped reflections from the leads; calculating a Z value for each lead by combining information from the locations of the donut shaped reflections and the locations of the crescent shaped reflections; calculating a coplanarity value for the ball array device by using the Z value for each lead; and determining an inspection result by comparing the coplanarity value to a predetermined tolerance value; and selecting the ball array device based upon the inspection result. ### Claim 17 A method of manufacturing a ball array device having a plurality of leads, the method comprising: providing an imaging system comprising at least two cameras; calibrating the imaging system with a planar precision pattern disposed in a fixed focus position; obtaining two differing views of the leads in at least one image using the calibrated imaging system; obtaining a donut shaped reflection from each lead and a crescent shaped reflection from each lead in the at least one image; finding at least two reference positions of each lead in the at least one image; calculating a Z value of each lead using the at least two reference positions of each lead; calculating a coplanarity value using information from the Z value of each lead; determining an inspection result by comparing the coplanarity value to a tolerance value; and selecting the ball array device as a manufactured product depending upon the inspection result. ### Claim 18 A method of manufacturing a ball array device having a plurality of leads, the method comprising: providing an imaging system comprising two cameras, fixed optics, illumination, a processor and memory; calibrating the imaging system with a planar precision pattern in a fixed focus position; obtaining a single bottom view image of the leads using the calibrated imaging system; obtaining a single side view image of the leads using the calibrated imaging system; finding a subpixel location of a reflection from each lead in the single bottom view image; finding a subpixel location of a reflection from each lead in the single side view image; calculating a Z value for each lead by combining information from the subpixel location of a reflection from the lead in the single bottom view image and the subpixel location of the reflection from the same lead in the single side view image; calculating a coplanarity value for the ball array device by using information from the Z value of each lead; determining an inspection result by comparing the coplanarity value to a predetermined tolerance value; and sorting the ball array device based upon the inspection result. ### Claim 19 A method of manufacturing a ball array device having a plurality of leads, the method comprising: providing an imaging system comprising two cameras, fixed optics, fixed illumination, a processor, memory and a planar precision pattern; calibrating the first camera with the planar precision pattern in a fixed focus position; calibrating the second camera with the planar precision pattern in a fixed focus position; obtaining a generally circular shaped reflection from each lead in a bottom view image using the first camera; obtaining a generally curvilinear shaped reflection from each lead in a side view image using the second camera; calculating a Z value for each lead using information from the bottom view image and the side view image; calculating a coplanarity value using information from the Z values; determining an inspection result by comparing the coplanarity value to a tolerance value; and sorting the ball array device as a manufactured product depending upon the inspection result. ### Claim 20 A method of manufacturing a ball array device having a plurality of leads, the method comprising: providing an imaging system comprising a first camera, a second camera, fixed optics, fixed illumination, a processor, memory and a planar precision pattern; calibrating the imaging system with the planar precision pattern; obtaining a generally circular shaped reflection from each lead in a bottom view image using the first camera; obtaining a generally curvilinear shaped reflection from each lead in a side view image using the second camera; calculating a Z value for each of the leads using information from the bottom view image and the side view image; calculating a coplanarity value using information from the Z values of each of the leads; determining an inspection result by comparing the coplanarity value to a tolerance value; and selecting the ball array device as a manufactured product depending upon the inspection result. ### Claim 21 A ball array device having a plurality of leads, the device being produced according to a process comprising: providing a fixed optical imaging system comprising at least two cameras; calibrating the fixed optical imaging system with a planar precision pattern disposed in a fixed position; obtaining a single bottom view image of the leads using the calibrated system; obtaining a single side view image of the leads using the calibrated system; calculating an inspection result by combining information from the single bottom view image and the single side view image; and selecting the ball array device as a manufactured product using the calculated inspection result. ### Claim 22 (depends on 21) The ball array device of claim 21, wherein the ball array device is selected from the group consisting of: ball grid array, ball grid array socket, bump on wafer, ceramic ball grid array, chip array ball grid array, chip scale product, flip chip ball grid array, flip chip scale product, high performance ball grid array, land grid array, land grid array socket, leadless chip carrier, micro lead frame, plastic ball grid array, super ball grid array, super flip chip, system in a package, and thin chip array ball grid array. ### Claim 23 (depends on 21) The ball array device of claim 21, wherein the plurality of leads is selected from the group consisting of: bumps, balls, columns, contacts, pads, pins, towers, posts, micro-pins, and pedestals. ### Claim 24 (depends on 21) The ball array device of claim 21, wherein the fixed optical imaging system comprises at least two cameras, at least one lens, at least one illumination source, at least one processor and memory. ### Claim 25 (depends on 21) The ball array device of claim 21, wherein the fixed optical imaging system comprises two cameras, optics, illumination and a computer. ### Claim 26 (depends on 21) The ball array device of claim 21, wherein the planar precision pattern is selected from the group consisting of: calibration reticle, precision pattern that is generally planar, precision pattern of fiducials disposed on a generally planar surface, precision pattern on a metal surface and precision pattern on a glass surface. ### Claim 27 (depends on 21) The ball array device of claim 21, wherein the information from the single bottom view image and the single side view image is selected from the group consisting of: a subpixel position of the center of a donut shaped reflection, a subpixel position of the center of a crescent shaped reflection, a subpixel position of the top of a crescent shaped reflection, a subpixel position of the center of an ellipse shaped reflection, a subpixel position of the top of an ellipse shaped reflection, a Db displacement in the single bottom view image, a Ds displacement in the single side view image, a world location, and a subpixel location relative to the stored locations of at least three calibration fiducials. ### Claim 28 (depends on 21) The ball array device of claim 21, wherein the inspection result is selected from the group consisting of: pass, rework, invalid, not found, reject and fail. ### Claim 29 (depends on 21) The ball array device of claim 21, wherein the ball array device selected as a manufactured product is selected from the group consisting of: finished good, assembled ball array device, finished ball array device, accepted ball array device, ball array device ready for packaging, ball array device ready for shipping, and ball array device ready to be passed on to a subsequent manufacturing step. ### Claim 30 (depends on 21) The ball array device of claim 21, wherein calculating an inspection result comprises calculating a Z value for each of the leads. ### Claim 31 (depends on 21) The ball array device of claim 21, wherein calculating an inspection result comprises calculating a coplanarity value for each of the leads. ### Claim 32 (depends on 21) The ball array device of claim 21, wherein calculating an inspection result comprises calculating a coplanarity value for each lead, calculating a maximum coplanarity value, and comparing the maximum coplanarity value to a predetermined tolerance value. ### Claim 33 (depends on 21) An electronic product comprising the ball array device of claim 21, wherein the electronic product is selected from the group consisting of: automotive controller, personal computer, digital camera, graphics board, memory device, motherboard, music player, networking device, telephone, cell phone, television, video game console and video player. ### Claim 34 A ball array device having a plurality of leads, the device being produced according to a process comprising: providing a fixed optical imaging system comprising at least two cameras; calibrating the fixed optical imaging system with a planar precision pattern disposed in a fixed focus position; obtaining a bottom view image comprising donut shaped reflections from the leads using the calibrated system; obtaining a side view image comprising crescent shaped reflections from the leads using the calibrated system; finding locations of the donut shaped reflections from the leads; finding locations of the crescent shaped reflections from the leads; calculating a Z value for each lead by combining information from the locations of the donut shaped reflections and the locations of the crescent shaped reflections; calculating a coplanarity value for the ball array device by using the Z value for each lead; and determining an inspection result by comparing the coplanarity value to a predetermined tolerance value; and selecting the ball array device based upon the inspection result. ### Claim 35 A ball array device having a plurality of leads, the device being produced according to a process comprising: providing an imaging system comprising at least two cameras; calibrating the imaging system with a planar precision pattern disposed in a fixed focus position; obtaining two differing views of the leads in at least one image using the calibrated imaging system; obtaining a donut shaped reflection from each lead and a crescent shaped reflection from each lead in the at least one image; finding at least two reference positions of each lead in the at least one image; calculating a Z value of each lead using the at least two reference positions of each lead; calculating a coplanarity value using information from the Z value of each lead; determining an inspection result by comparing the coplanarity value to a tolerance value; and selecting the ball array device as a manufactured product depending upon the inspection result. ### Claim 36 A ball array device having a plurality of leads, the device being produced according to a process comprising: providing an imaging system comprising two cameras, fixed optics, illumination, a processor and memory; calibrating the imaging system with a planar precision pattern in a fixed focus position; obtaining a single bottom view image of the leads using the calibrated imaging system; obtaining a single side view image of the leads using the calibrated imaging system; finding a subpixel location of a reflection from each lead in the single bottom view image; finding a subpixel location of a reflection from each lead in the single side view image; calculating a Z value for each lead by combining information from the subpixel location of a reflection from the lead in the single bottom view image and the subpixel location of the reflection from the same lead in the single side view image; calculating a coplanarity value for the ball array device by using information from the Z value of each lead; determining an inspection result by comparing the coplanarity value to a predetermined tolerance value; and sorting the ball array device based upon the inspection result. ### Claim 37 A ball array device having a plurality of leads, the device being produced according to a process comprising: providing an imaging system comprising two cameras, fixed optics, fixed illumination, a processor, memory and a planar precision pattern; calibrating the first camera with the planar precision pattern in a fixed focus position; calibrating the second camera with the planar precision pattern in a fixed focus position; obtaining a generally circular shaped reflection from each lead in a bottom view image using the first camera; obtaining a generally curvilinear shaped reflection from each lead in a side view image using the second camera; calculating a Z value for each lead using information from the bottom view image and the side view image; calculating a coplanarity value using information from the Z values; determining an inspection result by comparing the coplanarity value to a tolerance value; and sorting the ball array device as a manufactured product depending upon the inspection result. ### Claim 38 A ball array device having a plurality of leads, the device being produced according to a process comprising: providing an imaging system comprising a first camera, a second camera, fixed optics, fixed illumination, a processor, memory and a planar precision pattern; calibrating the imaging system with the planar precision pattern; obtaining a generally circular shaped reflection from each lead in a bottom view image using the first camera; obtaining a generally curvilinear shaped reflection from each lead in a side view image using the second camera; calculating a Z value for each of the leads using information from the bottom view image and the side view image; calculating a coplanarity value using information from the Z values of each of the leads; determining an inspection result by comparing the coplanarity value to a tolerance value; and selecting the ball array device as a manufactured product depending upon the inspection result.