Wave front sensing method and apparatus

Abstract

A new way of mixing instrumental and digital means is described for the general field of wave front sensing. The present invention describes the use, the definition and the utility of digital operators, called digital wave front operators (DWFO) or digital lenses (DL), specifically designed for the digital processing of wave fronts defined in amplitude and phase. DWFO are of particular interest for correcting undesired wave front deformations induced by instrumental defects or experimental errors. DWFO may be defined using a mathematical model, e.g. a polynomial function, which involves coefficients. The present invention describes automated and semi-automated procedures for calibrating or adjusting the values of these coefficients. These procedures are based on the fitting of mathematical models on reference data extracted from specific regions of a wave front called reference areas, which are characterized by the fact that specimen contributions are a priori known in reference areas. For example, reference areas can be defined in regions where flat surfaces of a specimen produce a constant phase function. The present invention describes also how DWFO can be defined by extracting reference data along one-dimensional (1D) profiles. DWFO can also be defined in order to obtain a flattened representation of non-flat area of a specimen. Several DWFO or DL can be combined, possibly in addition with procedures for calculating numerically the propagation of wave fronts. A DWFO may also be defined experimentally, e.g. by calibration procedures using reference specimens. A method for generating a DWFO by filtering in the Fourier plane is also described. All wave front sensing techniques may benefit from the present invention. The case of a wave front sensor based on digital holography, e.g. a digital holographic microscope (DHM), is described in more details. The use of DWFO improves the performance, in particular speed and precision, and the ease of use of instruments for wave front sensing. The use of DWFO results in instrumental simplifications, costs reductions, and enlarged the field of applications. The present invention defines a new technique for imaging and metrology with a large field of applications in material and life sciences, for research and industrial applications.

Dependencies are inferred from the claim text.