US 7,648,783 B2 · Cadmium tin oxide multi-layer laminate and producing method thereof

Abstract

A cadmium tin oxide (Cd1−xSnxO) multi-layer laminate is disclosed. The laminate comprises: a substrate; and a layer of Cd1−xSnxO which is not an epitaxial structure; wherein, the composition of Sn/(Cd+Sn) is 1˜20%. The method for producing the Cd1−xSnxO multi-layer laminate is also described here. The method comprises steps of: (a) providing metal or oxide targets for sputtering films of Cd1−xSnxO; and (b) sputtering films of Cd1−xSnxO from the targets onto the substrate; wherein the composition of Sn/(Cd+Sn) is 1˜20%.

Claims13

Dependent claims

A cadmium tin oxide, Cd1−xSnxO, multi-layer laminate comprises:

a substrate;
and
a non-epitaxial cadmium tin oxide layer;
wherein the atomic ratio of tin to cadmium and tin of said cadmium tin oxide layer [Sn/(Cd+Sn)=x/(1−x)+(x)=x] is 1˜20%, the specific resistance of said multi-layer laminate is less than 10−3 Ω-cm, the transmittance of said multi-layer laminate is greater than 85%, and the multi-layer laminate is a transparent electrode.

1 more element

Dependencies are inferred from the claim text.

Cadmium tin oxide multi-layer laminate and producing method thereof

Life of this patent

Cadmium tin oxide multi-layer laminate and producing method thereof

Life of this patent

Abstract

Claims13