Scanning probe microscope capable of measuring samples having overhang structure

A scanning probe microscope comprising:

• a first probe;
• first and second scanners for scanning a sample relative to the first probe while data relating to the sample are collected;
• the first scanner changing a position of the first probe along a straight line as the second scanner is changing a position of the sample so that a predetermined distance is maintained between the first probe and the sample;
• the second scanner changing the position of the sample in a plane;
• and
• a first actuator changing an angle formed between the straight line along which the position of the first probe is changed by using the first scanner and the plane in which the position of the sample is changed by using the second scanner.