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US 7,642,657 B2Granted
Stacked MEMS device
AssigneeAnalog Devices, Inc.
InventorsLiam O Suilleabhain, Raymond Goggin, Eva Murphy, Kieran P. Harney
Life of this patent
Estimating the term…
Abstract
A MEMS apparatus has a MEMS device sandwiched between a base and a circuit chip. The movable member of the MEMS device is attached at the side up against the circuit chip. The movable member may be mounted on a substrate of the MEMS device or formed directly on a passivation layer on the circuit chip. The circuit chip provides control signals to the MEMS device through wire bonds, vias through the MEMS device or a conductive path such as solder balls external to the MEMS device.
Claims27
A MEMS apparatus comprising:
- a base having electrical interconnects;
- a MEMS device having a cap side, a substrate side and a movable member, the movable member attached at and electrically connected through the substrate side and enclosed within a chamber between the substrate side and the cap side, the cap side being secured to the base;
- and
- a circuit chip at the substrate side of the MEMS device for electrically controlling the movable member, the movable member being between the base and the circuit chip.
1 more element
A MEMS switch comprising:
- a MEMS device having a movable gold beam suspended from a semiconductor substrate and a semiconductor cap enclosing a chamber about the beam;
- a plurality of conductive vias through the semiconductor cap;
- a plurality of conductive bumps on the semiconductor cap, each in electrical connection with one of the vias;
- and
- a circuit chip for electrically controlling movement of the movable gold beam between an open position breaking an electrical connection with the vias and a closed position completing an electrical connection with the vias, the circuit chip being secured parallel to and on the semiconductor substrate.
2 more elements
A MEMS apparatus comprising:
- a base having electrical interconnects;
- a MEMS device having a cap side, a substrate side and a movable member, the movable member attached at the substrate side and enclosed within a chamber between the substrate side and the cap side, the can side being secured to the base;
- and
- a circuit chip at the substrate side of the MEMS device for electrically controlling the movable member between an open position breaking an electrical connection to the substrate side and a closed position completing an electrical connection to the substrate side, the movable member being between the base and the circuit chip.
1 more element
Dependencies are inferred from the claim text.