Plating solution, process for producing a structure with the plating solution, and apparatus employing the plating solution
AssigneeCanon Kabushiki Kaisha
InventorsShigeru Ichihara, Tohru Den, Nobuhiro Yasui
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Abstract
A stable FePt plating solution is provided. Further, a process for electroplating is provided for producing an FePt magnetic material having an especially strong coercive force and excellent properties by using the plating solution. The plating solution contains ionic Fe, ionic Pt, and a complex agent, at a molar ratio (Fe/Pt) of the ionic Fe to the ionic Pt ranging from 0.75 to 3.
Claims8
A solution comprising ionic Fe supplied to the solution by an iron salt, ionic Pt supplied to the solution by a hexachloroplatinate(IV) salt, at a molar ratio of the ionic Fe to the ionic Pt ranging from 0.75 to 3, tartaric acid as a complexing agent, and chloride ion in an amount in excess of any chloride ion supplied to the solution by the iron salt and the hexachloroplatinate(IV) salt,
- wherein the solution is such that it is capable of depositing FePt or FePtCu when plating using the solution is performed,
- wherein a concentration of the ionic Fe is from 0.01 mol/L to 0.05 mol/L,
- wherein a pH of the solution is from 7.0 to 9.0, and
- wherein the chloride ion concentration is not lower than a molar concentration of the hexachloroplatinate(IV) salt.
Dependencies are inferred from the claim text.