Method for dynamic sensor configuration and runtime execution
AssigneeTokyo Electron Limited
InventorsMerritt Funk, Masaki Tozawa
Life of this patent
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Abstract
Graphical User Interfaces (GUIs) are presented for configuring and setting-up dynamic sensors for monitoring tool and process performance in a semiconductor processing system. The semiconductor processing system includes a number of processing tools, a number of processing modules (chambers), and a number of sensors. The graphical display is organized so that all significant parameters are clearly and logically displayed so that the user is able to perform the desired configuration and setup tasks with as little input as possible. The GUI is web-based and is viewable by a user using a web browser.
Claims24
A method for setting-up a dynamic sensor in a semiconductor processing environment using Graphical User Interfaces (GUIs), the method comprising:
- executing a data collection plan wherein the dynamic sensor includes an ODP sensor, an OES sensor, a VIP sensor, or any combination thereof;
- using the data collection plan to determine a dynamic sensor setup plan, wherein a start time, a stop time spike counting, step trimming, value thresholds, and value clip limits are determined by the dynamic sensor setup plan;
- executing the dynamic sensor setup plan to set up the dynamic sensor, wherein the dynamic sensor setup plan includes an IP address for the dynamic sensor.
Dependencies are inferred from the claim text.