Apparatus and methods for nanolithography using nanoscale optics
AssigneeThe Trustees of Boston College
InventorsKrzysztof J. Kempa, Michael J. Naughton, Zhifeng Ren, Jakub A. Rybczynski
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Abstract
An apparatus and methods for nanolithography using nanoscale optics are disclosed herein. Submicron-scale structures may be obtained using standard photolithography systems with a de-magnifying lens. A de-magnifying lens for use in a standard photolithography system includes a film having a top surface, a bottom surface and a plurality of cylindrical channels containing a dielectric material; and an array of carbon nanotubes penetrating the film through the plurality of cylindrical channels, wherein an image on the top surface of the film is converted into a de-magnified image on the bottom surface of the film by the carbon nanotubes.
Claims24
A de-magnifying lens for use in a standard photolithography system comprising:
- a film having a top surface, a bottom surface and a plurality of cylindrical channels containing a dielectric material;
- and
- an array of carbon nanotubes penetrating and converging through the film through the plurality of cylindrical channels,
- wherein an image on the top surface of the film is converted into a de-magnified image on the bottom surface of the film by the carbon nanotubes,
- wherein each carbon nanotube connects a light-receiving pixel on the top surface of the film with a light-emitting pixel on the bottom surface of the film, and
- wherein the light-receiving pixels on the top surface of the film are indirectly mapped to the light-emitting pixels on the bottom surface of the film by scrambled wiring through a nano-coaxial transmission line.
A nanolithography apparatus comprising:
- a metallic film having a top surface, a bottom surface and a plurality of cylindrical channels containing a dielectric material;
- and
- an array of nanorods penetrating the metallic film through the plurality of cylindrical channels, the array of nanorods having a protruding portion that extends beyond a surface of the metallic film and an embedded portion that is within the metallic film,
- wherein each nanorod connects a light-receiving pixel on the top surface of the film with a light-emitting pixel on the bottom surface of the film, and
- wherein the light-receiving pixels on the top surface of the film are indirectly mapped to the light-emitting pixels on the bottom surface of the film by scrambled wiring through a nano-coaxial transmission line.
A de-magnifying lens for use in nanolithography comprising:
- a film having a top surface, a bottom surface and a plurality of cylindrical channels containing a dielectric material coated with a conductor;
- and
- an array of nanorods penetrating and converging through the film through the plurality of cylindrical channels,
- wherein an image on the top surface of the film is converted into a de-magnified image on the bottom surface of the film by the nanorods,
- wherein each nanorod connects a light-receiving pixel on the top surface of the film with a light-emitting pixel on the bottom surface of the film, and
- wherein the light-receiving pixels on the top surface of the film are indirectly mapped to the light-emitting pixels on the bottom surface of the film by scrambled wiring through a nano-coaxial transmission line.
Dependencies are inferred from the claim text.