# US 7,632,383 B2 · Vacuum sputtering cathode

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- Number: US 7,632,383 B2
- Document ID: US7632383B2
- Status: Granted
- Kind: B2
- Application number: 11/032,430
- Filed: 2005-01-10
- Published: 2005-07-21
- Granted: 2009-12-15
- Earliest claimed: 2003-07-08
- Assignees: Tecmachine
- Inventors: Lionel Labalme; Michel Aulagner
- Web page: https://patentgrep.com/patent/US7632383B2

## CPC

- H01J 37/3435: {Target holders (includes backing plates and endblocks)}
- H01J 37/3497: {Temperature of target}
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)

## Abstract

A vacuum sputtering cathode includes a target support having a cooler. The cathode includes a support base on which a frame is disposed. The frame defines at least one cavity for the circulation of a coolant. A membrane is disposed on top of the frame and the base, frame and membrane are assembled at the periphery of the target.

## Claims

### Claim 1

A cathode for vacuum sputtering having a support for a target of the cathode, the support comprises a cooler having a support base on which a frame is superposed, the frame delimiting at least one gap for circulation of a cooling fluid, the frame having a membrane superposed thereon, and the base, the frame and the membrane being joined together around a periphery of the target;
wherein the membrane comprises at least two superposed materials; and
wherein one of the two superposed materials acts as a structure and is selected to elastically deform and the other material of the superposed materials is selected to plastically deform so as to follow a surface of the sputtering target mounted in combination with the membrane.

### Claim 2 (depends on 1)

The cathode according to claim 1, wherein at least one side of the frame has, in a same plane as the frame, at least one arm to delimit ducts for the circulation of the cooling fluid.

### Claim 3 (depends on 1)

The cathode according to claim 1 wherein an assembly comprising the support, the frame and the membrane is secured to a frame delimiting a closed space for positioning and centering the target; the frame peripherally having a profiled catching rim configured to collaborate with a set of independent gripping elements having complementary catching shapes configured to allow an effect of tilting of the elements resulting from a clamping action exerted on members engaged in a thickness of the elements, and bearing against part of the catching rim of the frame, so that, under the tilting effect, a part of the catching shapes of the set of gripping elements bears facially against a peripheral edge of the target to secure the target.

### Claim 4 (depends on 3)

The cathode according to claim 3, wherein the complementary catching shapes of the gripping elements comprise a straight flute collaborating with the offset straight profile section of the frame and delimiting a nib collaborating with the slot to give rise to the tilting effect under the clamping action.

### Claim 5 (depends on 1)

The cathode of claim 1 wherein said membrane is in fluid communication with said base through said gap.

### Claim 6 (depends on 1)

The cathode of claim 1 wherein said base forms a bottom of said gap, said frame forms sides of said gap and said membrane forms a top of said gap.

### Claim 7 (depends on 1)

The cathode of claim 1 wherein said base comprises an inlet and an outlet for circulation of cooling fluid to said at least one gap.

### Claim 8 (depends on 2)

The cathode of claim 2 wherein said at least one arm avoids connecting to said membrane.

### Claim 9 (depends on 1)

The cathode of claim 1, wherein said base, said frame and said membrane are joined using penetrating welding.

### Claim 10 (depends on 1)

The cathode of claim 1, wherein said base, said frame and said membrane are non-releasably joined.

### Claim 11 (depends on 1)

The cathode of claim 1, wherein the one of the superposed materials comprises a first peripheral area and a central area, the other material of the superposed material comprises a second peripheral area and a second central area, and wherein the first peripheral area and the second peripheral area are joined to each other around the periphery of the target, and the first central portion and the second central portion avoid being joined to each other.