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US 7,632,087 B2Granted
Composite stamper for imprint lithography
AssigneeWD Media, LLC
InventorAndrew M. Homola
Life of this patent
Estimating the term…
Abstract
A stamper having a patterned layer composed of a hard material and a compressible material back plane layer. The back plane layer may be composed of an elastomer. The stamper may be used to imprint an embossable layer disposed above a substrate for the production of a magnetic recording disk.
Claims4
A production stamper, comprising:
- a patterned layer comprising a hard material and having a first diameter, the patterned layer having a back plane bounded by an outer wall forming a cavity;
- and
- a back plane layer directly bonded to the back plane of the patterned layer within the cavity of the outer wall, the back plane layer comprising an elastomer and having a second diameter being less than the first diameter, wherein
- the patterned layer has a first thickness in a range of 1 to 300 microns and the back plane layer has a second thickness being approximately equal to or greater than the first thickness of the patterned layer, the second thickness being greater than 300 microns,
- the hard material has a hardness value in a range of HV100 to HV1000, and
- the elastomer has a hardness value in a range of 20 to 55 Shore 00 scale or 10 to 100 on Shore A scale.
3 more elements
Dependencies are inferred from the claim text.