Electromechanical device with optical function separated from mechanical and electrical function
AssigneeQUALCOMM MEMS Technologies, Inc.
InventorsDenis Endisch, Marc Mignard
Life of this patent
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Abstract
In certain embodiments, a microelectromechanical (MEMS) device comprises a substrate having a top surface, a movable element over the substrate, and an actuation electrode disposed laterally from the reflective surface. The movable element comprises a deformable layer and a reflective element mechanically coupled to the deformable layer. The reflective element includes a reflective surface. The movable element is responsive to a voltage difference applied between the actuation electrode and the movable element by moving in a direction generally perpendicular to the top surface of the substrate.
Claims33
An electromechanical device comprising:
- a substrate;
- a movable element over the substrate, the movable element comprising an electrically conductive deformable layer and a reflective element mechanically coupled to the deformable layer, the reflective element including a reflective surface, the reflective surface spaced from the deformable layer along a direction generally parallel to the reflective surface;
- and
- an actuation electrode under at least a portion of the deformable layer and disposed laterally from the reflective surface, the movable element responsive to a voltage difference applied between the actuation electrode and the deformable layer by moving in a direction towards the substrate, wherein a stationary portion of the device is configured to act as a stop for movement of the movable element, the movable element responsive to the voltage difference applied between the actuation electrode and the deformable layer by moving from a first position in which a portion of the movable element is not in contact with the stationary portion to a second position in which the portion is in contact with the stationary portion.
An electromechanical device comprising:
- a substrate;
- a movable element over the substrate, the movable element comprising an electrically conductive deformable layer and a reflective element mechanically coupled to the deformable layer, the reflective element including a reflective surface, the reflective surface spaced from the deformable layer along a direction generally parallel to the reflective surface;
- and
- an actuation electrode under at least a portion of the deformable layer and disposed laterally from the reflective surface, the movable element responsive to a voltage difference applied between the actuation electrode and the deformable layer by moving in a direction away from the substrate, wherein a stationary portion of the device is configured to act as a stop for movement of the movable element, the movable element responsive to the voltage difference applied between the actuation electrode and the deformable layer by moving from a first position in which a portion of the movable element is not in contact with the stationary portion to a second position in which the portion is in contact with the stationary portion.
An electromechanical device comprising:
- a movable element comprising a deformable layer and a reflective element, the deformable layer extending along at least two sides of the reflective element, the reflective element mechanically coupled to the deformable layer at least partially by a connecting element on the at least two sides;
- and
- an actuation electrode under at least a portion of the deformable layer along the at least two sides of the reflective element.
Dependencies are inferred from the claim text.