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US 7,629,865 B2Granted
Piezoelectric resonator structures and electrical filters
AssigneeAvago Technologies Wireless IP (Singapore) Pte. Ltd.
InventorRichard C. Ruby
Life of this patent
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Abstract
Film bulk acoustic resonators (FBARs) stacked FBARs (SBARS) including at least two curved edges are disclosed.
Claims24
An electrical resonator, comprising:
- a first electrode having at least two curved edges and at least one substantially linear edge, wherein the edges comprise a perimeter of the first electrode and none of the curved edges are concave;
- a second electrode having at least two curved edges and at least one substantially linear edge, wherein the edges comprise a perimeter of the second electrode and none of the curved edges are concave;
- and
- a layer of piezoelectric material disposed between the first and second electrodes, wherein thickness-extensional (TE) modes propagate along a thickness of the layer.
1 more element
An electrical resonator structure, comprising:
- a plurality of electrical resonators, wherein each of the electrical resonators comprises:
- a first electrode having at least two curved edges and at least one substantially linear edge, wherein the edges comprise a perimeter of the first electrode and none of the curved edges are concave;
- a second electrode having at least two curved edges and at least one substantially linear edge, wherein the edges comprise a perimeter of the second electrode and none of the curved edges are concave;
- and
- a layer of piezoelectric material disposed between the first and second electrodes, wherein thickness-extensional (TE) modes wherein thickness-extensional (TE) modes propagate along a thickness of the layer.
2 more elements
An electrical filter, comprising:
- one or more resonators, each of which includes:
- a first electrode having at least two curved edges and at least one substantially linear edge, wherein the edges comprise a perimeter of the first electrode and none of the curved edges are concave;
- a second electrode having at least two curved edges and at least one substantially linear edge, wherein the edges comprise a perimeter of the second electrode and none of the curved edges are concave;
- and
- a layer of piezoelectric material disposed between the first and second electrodes, wherein thickness-extensional (TE) modes propagate along a thickness of the layer.
2 more elements
Dependencies are inferred from the claim text.