Electrochemical deposition method utilizing microdroplets of solution
AssigneeBoise State University
InventorsWilliam B. Knowlton, Dale D. Russell
Life of this patent
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Abstract
A method of electrochemical deposition uses microdroplets of electrolytic solution over a targeted small circuit element. Only the targeted circuit element is electrically biased so that deposition occurs on the surface of that element, underneath the microdroplet, and nowhere else unless it is under other microdroplet(s). The invented method achieves extremely accurate and selective electrochemical deposition with a tiny amount of electrolytic solution, compared to conventional submersive and/or immersive methods, and eliminates the need for masking or etching, reducing the costs of manufacture and amount of waste electrolytic solution produced.
Claims21
A method of selective electrochemical deposition, comprising:
- placement of a droplet of electrolytic solution on a substrate;
- providing of a first probe in contact with said droplet, but not said substrate;
- providing a second probe in said droplet and in contact with a circuit element on said substrate where in a part of said circuit element is in contact with said droplet;
- and
- establishing of an electrical current between said first probe and said second probe to induce electrochemical deposition upon said contacted circuit element.
Dependencies are inferred from the claim text.