Folded cavity of optoelectronic devices
AssigneeThe Centre for Integrated Photonics Limited
InventorsIan Francis Lealman, Graeme Douglas Maxwell, David William Smith, Michael James Robertson, Alistair James Poustie, Xin Chen
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Abstract
An optoelectronic device has at least a first facet (S), a first waveguide (2) and a second waveguide (3). The waveguides are substantially coincident at the first facet (6), such that light travelling along the first waveguide (2) is reflected into the second waveguide (3) by the first facet (6). The first facet (6) is formed by precision cleaving. Preferably an etch feature is incorporated in the same mask level as that to define the waveguide core.
Claims5
A method of fabricating an optoelectronic device comprising a first waveguide and a second waveguide, that are substantially coincident at a first facet, such that light travelling along the first waveguide is reflected into the second waveguide by the first facet, characterised in that the method comprises:
- defining an etch feature in a waveguide layer that forms the first and second waveguides;
- etching the feature to form a point of weakness in the layer;
- and
- applying pressure to the waveguide layer and any additional layers of the device to cleave the waveguide layer, whereby to form the first facet.
Dependencies are inferred from the claim text.