Manufacturing method of optical-electrical substrate and optical-electrical substrate
AssigneeShinko Electric Industries Co., Ltd.
InventorKenji Yanagisawa
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Abstract
In a manufacturing method of an optical-electrical substrate comprising a wiring substrate, an optical waveguide which is disposed on the wiring substrate and transmits an optical signal, and mirrors for reflecting the optical signal, insulating members having smooth inclined surfaces are formed on the wiring substrate and thereafter, a metal film is formed on the smooth inclined surfaces and the mirrors are formed.
Claims5
A manufacturing method of an optical-electrical substrate comprising a wiring substrate, an optical waveguide which is disposed on the wiring substrate and transmits an optical signal, and a mirror for reflecting the optical signal, the method comprising:
- an insulating member formation step of forming an insulating member having a smooth inclined surface on the wiring substrate,
- a mirror formation step of forming the mirror on the smooth inclined surface, and
- an optical waveguide formation step of forming an optical waveguide on the wiring substrate after the mirror formation step.
Dependencies are inferred from the claim text.