Pattern inspection method and apparatus using linear predictive model-based image correction technique

An apparatus for performing pattern inspection while using a reference pattern image of a workpiece being tested and a pattern image under test to generate a correction pattern image, said apparatus comprising:

• a pattern extraction unit operative to cut a pattern as a cut-and-paste pattern out of a pattern existence region of the reference pattern image and the under-test pattern image;
• a pattern pasting unit operative to paste the cut-and paste pattern in pattern-less blank regions of the reference pattern image and the under-test pattern image to thereby generate a pasted reference pattern image and a pasted test pattern image;
• an equation generation unit operative to generate by linear predictive modeling a set of simultaneous equations for the pasted reference pattern image and the pasted test pattern image;
• a parameter generation unit operative to solve the simultaneous equations and obtain more than one model parameter;
• a corrected pattern image creation unit operative to use the model parameter to apply the linear predictive modeling to the pattern image for creation of a corrected pattern image;
• and
• a pattern image comparison unit operative to compare the corrected pattern image and the under-test pattern image for detecting defects of the under-test pattern image.

An image correction method for using an inspection reference pattern image of a workpiece being tested and a pattern image under test to generate a corrected pattern image carried out by an image correction device, said method comprising:

• cutting a pattern as a cut-and-paste pattern out of a pattern existence region of the reference pattern image and the under-test pattern image by the image correction device;
• pasting the cut-and-paste pattern in pattern-less blank regions of the reference pattern image and the under-test pattern image to thereby generate a pasted reference pattern image and a pasted test pattern image by the image correction device;
• generating by linear predictive modeling a set of simultaneous equations for the pasted reference pattern image and the pasted test pattern image by the image correction device;
• solving the simultaneous equations and obtain more than one model parameter by the image correction device;
• and
• using the model parameter to apply the linear predictive modeling to the pattern image for creation of a corrected pattern image by the image correcting device.

A method for performing pattern inspection while using a reference pattern image of a workpiece being tested and a pattern image under test to generate a correction pattern image carried out by a pattern inspection apparatus, comprising:

• cutting a pattern as a cut-and-paste pattern out of a pattern existence region of the reference pattern image and the under-test pattern image by the pattern inspection apparatus;
• pasting the cut-and-paste pattern in pattern-less blank regions of the reference pattern image and the under-test pattern image to thereby generate a pasted reference pattern image and a pasted test pattern image by the pattern inspection apparatus;
• generating by linear predictive modeling a set of simultaneous equations for the pasted reference pattern image and the pasted test pattern image by the pattern inspection apparatus;
• solving the simultaneous equations and obtain more than one model parameter by the pattern inspection apparatus;
• using the model parameter to apply the linear predictive modeling to the pattern image for creation of a corrected pattern image by the pattern inspection apparatus;
• and
• comparing the corrected pattern image and the under-test pattern image for detecting defects of the under-test pattern image by the pattern inspection apparatus.