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US 7,626,712 B2Granted
Methods and systems for characterizing semiconductor materials
AssigneeSematech, Inc.
InventorJames Martin Price
Life of this patent
Estimating the term…
Abstract
Methods for determining parameters of a semiconductor material, for example, non-classical substrates such as silicon-on-insulator (SOI) substrates, strained silicon-on-insulator (sSOI) substrates, silicon-germanium-on-insulator (GeOI) substrates, and strained silicon-germanium-on-insulator (sGeOI) substrates are described. The method provides steps for transforming data corresponding to the semiconductor material from real space to reciprocal space. The critical points are isolated in the reciprocal state and corresponding critical energies of the critical points are determined. The difference between the critical energies may be used to determine a thickness of a layer of the semiconductor material, in particular, a quantum confined layer.
Claims11
A method comprising:
- providing a semiconductor material comprising a plurality of layers;
- obtaining data corresponding to the semiconductor material with a detector;
- receiving the data from the detector at a processor, the processor suitably programmed for transforming the data into reciprocal space data, the transforming the data comprising:
- constructing Fourier coefficients;
- calculating an amplitude and phase of the Fourier coefficients;
- and
- determining a natural logarithm of the amplitude versus a Fourier index;
- determining at least one critical point from the reciprocal space data;
- converting the at least one critical point of the reciprocal space data to real space data;
- and
- characterizing at least one of the plurality of layers of the semiconductor material based on the real space data.
8 more elements
A method comprising:
- providing a silicon on insulator substrate;
- obtaining data corresponding to the silicon on insulator substrate with a detector;
- and
- receiving the data from the detector at a processor, the processor suitably programmed for:
- transforming the data into reciprocal space data;
- determining at least one critical point from the reciprocal space data;
- converting the at least one critical point of the reciprocal space data to real space data;
- and
- determining a thickness of a layer of the silicon on insulator substrate as function of the at least one critical point.
6 more elements
A method comprising:
- providing a silicon on insulator substrate;
- obtaining data corresponding to the silicon on insulator substrate with a detector;
- and
- receiving the data from the detector at a processor, the processor suitably programmed for:
- transforming the data into reciprocal space data;
- determining at least one critical point from the reciprocal space data;
- converting the at least one critical point of the reciprocal space data to real space data;
- and
- determining a thickness of a layer of the silicon on insulator substrate by plotting the at least one point converted from the reciprocal space to real space data versus predetermined thickness of known layers silicon on insulator substrates.
6 more elements
A system comprising:
- a light source for illuminating a semiconductor material;
- a detector coupled to the semiconductor material for detecting a light reflected from the semiconductor material and generating data corresponding to the semiconductor material;
- a processor coupled to the detector, the processor configured for:
- receiving the generated data;
- transforming the data into reciprocal space data;
- determining at least one critical point from the reciprocal space data;
- converting the at least one critical point of the reciprocal space data to real space data;
- and
- characterizing the semiconductor material based on the real space data;
- and
- determining a thickness of at least one of a plurality of layers of the semiconductor material based on the at least one critical point data converted from the reciprocal space data to real space data.
8 more elements
A system comprising:
- a light source for illuminating a semiconductor material;
- a detector coupled to the semiconductor material for detecting a light reflected from the semiconductor material and generating data corresponding to the semiconductor material;
- and
- a processor coupled to the detector, the processor configured for:
- receiving the generated data;
- transforming the data into reciprocal space data;
- determining at least one critical point from the reciprocal space data;
- converting the at least one critical point of the reciprocal space data to real space data;
- characterizing the semiconductor material based on the real space data;
- determining a thickness of at least one of a plurality of layers of the semiconductor material;
- and
- plotting the at least one critical point data converted from the reciprocal space data to real space data versus predetermined thickness of known layers silicon on insulator substrates.
9 more elements
Dependencies are inferred from the claim text.