Device for examining the optical properties of surfaces
AssigneeBYK Gardner GmbH
InventorsPeter Schwarz, Uwe Sperling
Life of this patent
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Abstract
A device for examining the optical properties of surfaces includes at least one first radiation device which emits radiation to a surface to be examined at a first predetermined spatial angle, at least one first detector device for capturing the radiation emitted to and reflected back from the surface wherein the first detector device, allowing a local resolution of detected radiation, is positioned at least at a second predetermined spatial angle relative to the surface, and at least one further radiation device or second detector device emitting radiation to the surface to be examined at a third predetermined spatial angle or detecting radiation emitted to and reflected back from the surface.
Claims24
A device for examining the optical properties of surfaces comprising:
- at least one first radiation means emitting radiation at a first predetermined spatial angle to a surface to be examined;
- at least one first detector means for capturing the radiation emitted to and reflected back from the surface wherein said first detector means comprises an image-capturing component, allowing a local resolution of detected radiation, wherein said first detector means is positioned at a second predetermined spatial angle relative to said surface;
- at least one second detector means which detects radiation emitted to and reflected back from said surface to be examined, allowing an examination of at least one of an intensity and spectral characteristics of detected radiation, wherein said second detector means is arranged at a third predetermined spatial angle;
- and
- wherein said first, second and third spatial angles are each defined by a tuple of a first spatial subangle indicating a projection angle of a direction in space defined by a half straight line beginning in a point of origin in a Cartesian coordinate system onto an x/z plane perpendicular to said surface to be examined lying on an x/y plane, and a second spatial subangle indicating a projection angle of said half straight line onto a y/z plane perpendicular to said surface to be examined lying on the x/y plane;
- wherein said first and said second spatial angles are chosen such that a difference of said first and second spatial angles relative to said first and second spatial subangles is less than 50°.
A method for examining the properties of optical surfaces including the steps:
- directing a first radiation at a surface to be examined at a first predetermined spatial angle;
- detecting the radiation reflected back from said surface to be examined using a first detector means at a second predetermined spatial angle, wherein said first detector means allows a local resolution of detected radiation;
- detecting the radiation reflected back from the surface to be examined by means of a second detector means at a third predetermined spatial angle, wherein said second detector means allows an examination of at least one of intensity and spectral characteristics of detected radiation,
- wherein said first, second and third spatial angles are each defined by a tuple of a first spatial subangle indicating a projection angle of a direction in space defined by a half straight line beginning in a point of origin in a Cartesian coordinate system onto an x/z plane pemendicular to said surface to be examined lying on an x/y plane, and a second spatial subangle indicating a projection angle of said half straight line onto a y/z plane perpendicular to said surface to be examined lying on the x/y plane, and
- wherein said first and said second spatial angles are chosen such that a difference of said first and second spatial angles relative to said first and second first spatial subangles will result which is less than 50°.
Dependencies are inferred from the claim text.