Phase shifting grating-slit test for optical surface reconstruction
OwnerChao-Wen Lianginventor
Life of this patent
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Abstract
An optical system representing the configuration of a tested element disposed therein is provided. The optical system comprises a light source emitting a spatial-incoherent light having a phase shifting scheme toward the tested element and then forming an image with a transverse ray aberration on the image plane of the tested element; a spatial filter on the image plane to spatially filter the image formed by the tested element; and a detection module comprising a detector for receiving the spatially filtered image.
Claims29
An optical system for representing the configuration of a tested element disposed therein, comprising:
- a light source emitting a spatial-incoherent light having a phase shifting scheme toward the tested element and then forming an image with a transverse ray aberration on the image plane of the tested element;
- a spatial filter on the image plane to spatially filter the image formed by the tested element;
- and
- a detection module comprising a detector for receiving the spatially filtered image.
An optical system for representing the configuration of a tested element disposed therein by calculating the wavefront of wave propagation emitted from the tested element, comprising:
- a light source emitting a spatial-incoherent light having a phase shifting scheme toward the tested element and then emitting the wave propagation which forms an image with a transverse ray aberration on the image plane of the tested element;
- a spatial filter on the image plane to spatially filter the image formed by the tested element;
- and
- a detection module comprising a lens unit and a detector;
- wherein the lens unit between the spatial filter and the detector to relay the image formed by the tested element to the detector and then the detector receives the spatially filtered image.
Dependencies are inferred from the claim text.