Chamber particle detection system

A process chamber with a chamber particle monitor assembly to identify chamber particle source, comprising:

• a substrate support within the process chamber;
• at least one laser light source, wherein the at least one laser light source can scan laser light in a chamber process volume within the process chamber and the chamber process volume is defined between the substrate support and the chamber top plate;
• a plurality of laser light collectors, wherein the plurality of laser light collectors can collect laser light emitted from at least one laser light source continuously to monitor particle performance within the process chamber, wherein the plurality of laser light collectors are placed in the processing chamber such that none of the plurality of laser light collectors share a common axis;
• and
• an analyzer that analyzes signals representing the laser light collected by the plurality of laser light collectors to provide chamber particle information, wherein the plurality of laser light collectors enables construction of three-dimensional (3-D) images of particle distribution within the processing volume.

A method of collecting chamber particle information, comprising:

• scanning laser light emitted from at least one laser light source in a process volume inside a process chamber;
• collecting the laser light in the process chamber by multiple laser light collectors continuously to monitor particle performance within the process chamber, wherein the multiple laser light collectors are placed in the processing chamber such that none of the multiple laser light collectors share a common axis;
• and
• analyzing the collected laser light to determine chamber particle information, wherein the multiple laser light collectors enables construction of three-dimensional (3-D) images of particle distribution within the processing volume.