Distance measuring sensors including vertical photogate and three-dimensional color image sensors including distance measuring sensors

A distance measuring sensor, comprising:

• a photoelectric conversion region;
• a first charge storage region;
• a second charge storage region;
• a first trench;
• a second trench;
• a first vertical photogate;
• and
• a second vertical photogate;
• wherein the photoelectric conversion region is in a substrate,
• wherein the photoelectric conversion region is doped with a first impurity in order to generate charges in response to received light,
• wherein the first and second charge storage regions are in the substrate,
• wherein the first and second charge storage regions are doped with a second impurity in order to collect charges,
• wherein the first and second charge storage regions are separated from each other,
• wherein the first trench is formed to have a depth in the substrate that corresponds to the first charge storage region,
• wherein the second trench is formed to have a depth in the substrate that corresponds to the second charge storage region,
• wherein the first vertical photogate is in the first trench, and
• wherein the second vertical photogate is in the second trench.