Pixel circuit substrate, LCD apparatus and projection display apparatus having interlayer insulating film comprising a laminate of inorganic insulating material having a uniformly flat surface over TFT

A pixel circuit substrate comprising:

• a substrate;
• a thin film transistor formed on said substrate;
• a first interlayer insulating film comprising an inorganic material at least in source and drain regions of said thin film transistor, said first interlayer insulating film having a contact hole formed in an area immediately above said source and drain regions of said thin film transistor;
• a wiring layer which arranged on said first interlayer insulating film, extending to an inner wall and a bottom surface of said contact hole, the wiring layer being connected to said source and drain regions, a top surface of the wiring layer having a recess reflecting a shape of said contact hole;
• a second interlayer insulating film comprising a laminate of inorganic material, formed on said wiring layer and embedded in said recess, the second interlayer insulating film being a laminate to have a uniformly flat top surface in an area immediately above said thin film transistor including said source and drain regions;
• and
• a storage capacitor on said second interlayer insulating film disposed in said area immediately above said thin film transistor.