Optoelectronic interconnection board, optoelectronic interconnection apparatus, and manufacturing method thereof

An optoelectronic interconnection apparatus comprising:

• an optoelectronic interconnection board including optical interconnection lines having optical waveguides and electric interconnection lines formed of an electroconductive material, the optoelectronic interconnection board comprising:
• an optoelectronic interconnection board substrate, a main optical waveguide through which an optical signal is transmitted;
• first and second main optical input/output portions which transmit/receive the optical signal to/from the main optical waveguide;
• a monitoring optical waveguide which is independent from the main optical waveguide;
• and first and second monitoring optical input/output portions which are provided to respectively align with the first and second main optical input/output portions and transmit/receive light to/from the monitoring optical waveguide, and wherein the main optical waveguide, the monitoring optical waveguide, the main optical input/output portions and the monitoring optical input/output portions are provided in the optoelectronic interconnection board substrate;
• a first optical functional device which is disposed on the optoelectronic interconnection board and transmits/receives the optical signal to/from the main optical waveguide through the first main optical input/output portion;
• and
• a second optical functional device which is disposed on the optoelectronic interconnection board and transmits/receives the optical signal to/from the main optical waveguide through the second main optical input/output portion,
• wherein the first and second monitoring optical input/output portions are provided to the optoelectronic interconnection board outside a region where the first and second optical functional devices are disposed.

A manufacturing method of an optoelectronic interconnection apparatus which mounts an optical functional device having an optical active portion on an optoelectronic interconnection board including an optoelectronic interconnection board substrate, optical interconnection lines having optical waveguides and electric interconnection lines formed of an electroconductive material, comprising:

• detecting a monitoring light output from a monitoring optical input/output portion in the optoelectronic interconnection board substrate connected with a monitoring optical waveguide in the optoelectronic interconnection board substrate of the optoelectronic interconnection board, the monitoring optical waveguide being provided on the optoelectronic interconnection board independently from a main optical waveguide through which an optical signal is transmitted/received to/from the optical functional device via a main optical input/output portion in the optoelectronic interconnection board substrate, the monitoring optical input/output portion being provided close to the main optical input/output portion connected with the main optical waveguide;
• and
• arranging the optical functional device on the optoelectronic interconnection board at a position where the optical active portion of the optical functional device is coupled with the main optical input/output portion but not coupled with the monitoring optical input/output portion while the detected monitoring light being determined as an alignment reference.