Wavelength converting optical system, laser light source, exposure apparatus, mask examining apparatus, and macromolecular crystal lens machining device

A wavelength converting optical system comprising:

• a first wavelength converting optical system which forms a fifth harmonic wave from a first fundamental wave via at least one wavelength converting optical element;
• a second harmonic wave forming optical element which forms a second harmonic wave from a second fundamental wave;
• an optical member which combines on the same optical path the second fundamental wave and the second harmonic wave that are emitted from the second harmonic wave forming optical element with the fifth harmonic wave that is emitted from the first wavelength converting optical system;
• a seventh harmonic wave forming optical element which forms a seventh harmonic wave from the second harmonic wave and the fifth harmonic wave;
• and
• an eighth harmonic wave forming optical element which forms an eighth harmonic wave from the second fundamental wave and the seventh harmonic wave that are emitted from the seventh harmonic wave forming optical element.

A wavelength converting optical system comprising:

• a first wavelength converting optical system which forms a fifth harmonic wave from a first fundamental wave via at least one wavelength converting optical element;
• a second harmonic wave forming optical element which forms a second harmonic wave from a second fundamental wave;
• and
• an optical member which combines on the same optical path the second fundamental wave and the second harmonic wave that are emitted from the second harmonic wave forming optical element with the fifth harmonic wave that is emitted from the first wavelength converting optical system.