Electrical connection structure for magnetic heads and method for making the same
AssigneeHitachi Global Storage Technologies Netherlands B.V.
InventorsMustafa Michael Pinarbasi, Howard Gordon Zolla
Life of this patent
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Abstract
An electrically conductive etch stop layer is formed over a first electrically conductive layer. An electrically conductive diffusion barrier layer is then formed over the etch stop layer, followed by the formation of an insulator layer over the diffusion barrier layer. Utilizing an etching process with a patterned photoresist in place, insulator materials in a central region are removed to form a via which exposes electrically conductive materials in the central region. Finally, a second electrically conductive layer is formed within the via over the electrically conductive materials in the central region.
Claims21
An electrical connection structure for use in providing an electrical connection for a component, the electrical connection structure comprising:
- a first electrically conductive layer formed over an electrical lead of the component;
- an electrically conductive etch stop layer formed over the first electrically conductive layer;
- an electrically conductive diffusion barrier layer comprising ruthenium (Ru) formed over the electrically conductive etch stop layer;
- a second electrically conductive layer comprising a via formed in contact with one of the electrically conductive diffusion barrier layer and the electrically conductive etch stop layer;
- and
- electrically insulative materials formed around the via and over the electrically conductive diffusion barrier layer.
A magnetic head, comprising:
- at least one of a read head portion and a write head portion;
- an electrical connection structure which electrically connects the one of the read head portion and the write head portion to an electrical component;
- the electrical connection structure including:
- a first electrically conductive layer formed over an electrical lead of the one of the read head portion and the write head portion;
- an electrically conductive etch stop layer formed over the first electrically conductive layer;
- an electrically conductive diffusion barrier layer comprising ruthenium (Ru) formed over the electrically conductive etch stop layer;
- a second electrically conductive layer comprising a via formed in contact with one of the electrically conductive diffusion barrier layer and the electrically conductive etch stop layer;
- and
- electrically insulative materials formed around the via and over the electrically conductive diffusion barrier layer.
A disk drive, comprising:
- at least one rotatable magnetic disk;
- a spindle supporting the at least one rotatable magnetic disk;
- a disk drive motor for rotating the at least one rotatable magnetic disk;
- a magnetic head for reading data from the at least one rotatable magnetic disk;
- a slider;
- at least one of a read head portion and a write head portion carried on the slider;
- an electrical connection structure for use in electrically coupling the one of the read head portion and the write head portion to an electrical component of the disk drive;
- the electrical connection structure including:
- a first electrically conductive layer formed over an electrical lead of the one of the read head portion and the write head portion;
- an electrically conductive etch stop layer formed over the first electrically conductive layer;
- an electrically conductive diffusion barrier layer formed over the electrically conductive etch stop layer;
- a second electrically conductive layer comprising a via formed in contact with one of the electrically conductive diffusion barrier layer comprising ruthenium (Ru) and the electrically conductive etch stop layer;
- and
- electrically insulative materials formed around the via and over the electrically conductive diffusion barrier layer.
Dependencies are inferred from the claim text.