US 7,623,292 B2 · Laser irradiation apparatus, laser irradiation method, and method for manufacturing semiconductor device

Abstract

It is an object of the present invention to provide a laser irradiation apparatus, a laser irradiation method, and a method for manufacturing a semiconductor device using the laser irradiation method that can suppress the energy distribution of the laser beam. The present invention provides a laser irradiation apparatus including a laser oscillator oscillating a pulsed laser beam, a lens assembly having a plurality of optical systems, position control means for controlling the position of the lens assembly to select at least two from the plurality of optical systems in synchronization with oscillations of a plurality of pulses of the pulsed laser beam, wherein the selected plurality of optical systems forms a plurality of pulses with spatial energy distribution inverted or rotated each other.

Claims23

Dependent claims

A laser irradiation apparatus comprising:

a laser oscillator sequentially emitting a first pulse and a second pulse;
a condenser lens;
a lens array provided between the laser oscillator and the condenser lens;
and
position control means for controlling a position of the lens array so that the first pulse passes through a first region of the lens array and the second pulse passes through a second region of the lens array,
wherein the first pulse passed through the condenser lens and the second pulse passed through the condenser lens are irradiated to a same region on a processing object mounted on a stage.

3 more elements

Dependencies are inferred from the claim text.

Laser irradiation apparatus, laser irradiation method, and method for manufacturing semiconductor device

Life of this patent

Laser irradiation apparatus, laser irradiation method, and method for manufacturing semiconductor device

Life of this patent

Abstract

Claims23