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US 7,623,283 B2Granted
Actuator
AssigneeOlympus Corporation
InventorsSatoshi Inui, Masanori Ogata
Life of this patent
Estimating the term…
Abstract
An actuator includes a movable plate, at least one elastic member supporting the movable plate to allow the movable plate to rock, a support holding the elastic member, a wiring layer extending on the elastic member, and a protective film covering the wiring layer. The protective film is of a resin.
Claims1
An actuator comprising:
- a movable plate;
- at least one elastic member supporting the movable plate to allow the movable plate to rock;
- a support holding the elastic member;
- a wiring layer extending on the elastic member and made of a refractory metal that satisfies TM≧T/0.3;
- where T is a temperature used [K], and TM is a melting point[K];
- and
- a protective film covering the wiring layer.
4 more elements
Dependencies are inferred from the claim text.