System and method for inspecting a workpiece surface using polarization of scattered light

An optical collection and detection system for use in a surface inspection system for inspecting a surface of a workpiece, the surface inspection system having an incident beam projected through a back quartersphere and toward a desired location on the surface to impinge thereon to create reflected light and scattered light that is collected by a plurality of collector modules, the output from which is analyzed individually or in combinations, the optical collection and detection system comprising:

• a detection subsystem operatively coupled to a collector module, the detection subsystem having at least one light detection unit that is arranged to detect the scattered light collected by the collector module and generate signals in response, and
• a polarizing relay assembly positioned between the workpiece surface and the light detection unit arranged to selectively permit the scattered light having a selected polarization orientation to pass therethrough along at least one detector optical axis to the at least one light detection unit,
• wherein the polarizing relay assembly further comprises a virtual mask positioned along a first detection path and a virtual mask positioned along a second detection path, the virtual mask comprises a light absorbing glass mask optically bonded to the glass cube or a black anodized aluminum sheet metal masks positioned at a known optical imagining position in the first detection unit and the second detection unit.