US 7,623,223 B2 · Stress measurement method

Abstract

An object of this invention is to provide stress measurement method that is stress of the measuring object nondestructively in a short period of time. In order to attain this object, the stress measurement apparatus 1 comprises a correlation data storage section 41 that analyzes a correlation between reference stress related data obtained from a Raman spectrum L of an entire predetermined area W1 of a reference specimen W and local stress originated data as being data obtained based on a local stress each of which applies to multiple positions WS1˜WSn respectively in the predetermined area W1 and stores correlation data indicating the correlation, a data obtaining section 42 that obtains measurement stress related data from a Raman spectrum L on an entire measurement area W1′, corresponding to the predetermined area W1, of a measurement specimen WS′, and a calculation section 43 that calculates local stress originated data in the measurement area W1′ based on the correlation data and the measurement stress related data.

Claims6

Dependent claims

Stress measurement method comprising

a reference stress related data obtaining step that measures a Raman spectrum by irradiating energy lines on an entire predetermined area of a reference specimen, and obtains data (hereinafter called as reference stress related data) regarding stress of the entire predetermined area from the Raman spectrum,
a local stress originated data obtaining step that measures local stress applying to each of multiple positions in the predetermined area, and obtains local stress originated data as being data that can be obtained based on the local stress,
a correlation data storage step that analyzes a correlation between the reference stress related data and the local stress originated data, and stores correlation data indicating the correlation,
a measurement stress related data obtaining step that measures a Raman spectrum by irradiating energy lines on an entire area (hereinafter called as a measurement area), corresponding to the predetermined area, of a measurement specimen, and obtains data (hereinafter called as measurement stress related data) regarding stress of the entire measurement area from the Raman spectrum, and
a calculation step that calculates local stress originated data in the measurement area based on the correlation data and the measurement stress related data.

2 more elements

Dependencies are inferred from the claim text.

Stress measurement method

Life of this patent

Stress measurement method

Life of this patent

Abstract

Claims6