Measuring apparatus, and detection device

A measuring apparatus that measures a characteristic of a device under measurement, comprising:

• a measuring signal generating section that outputs a forward signal to the device under measurement through a device side terminal;
• a directional coupler that outputs a backward split signal obtained by splitting a part of a backward signal inputted from the device under measurement through the device side terminal;
• a backward mixer that outputs a backward detection signal obtained by multiplying a local signal having a predetermined frequency by the backward split signal;
• and
• an analysis section that analyzes a characteristic of the device under measurement based on the backward detection signal,
• wherein
• the directional coupler is included in a multilayer substrate,
• the backward mixer is included in a chip provided on a surface of the multilayer substrate,
• a concave portion is formed on a surface of the multilayer substrate,
• the chip is disposed on a bottom surface of the concave portion,
• the measuring apparatus further comprises a conductive lid portion that covers the concave portion,
• the multilayer substrate further includes a ground pattern formed under the chip, and
• the ground pattern and the conductive lid portion are electrically connected so as to surround the chip.