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AssigneeCanon Kabushiki Kaisha
InventorsToshihiro Ifuku, Tetsuro Fukui, Kenichi Takeda, Hiroshi Funakubo, Hiroshi Nakaki, Rikyu Ikariyama, Osami Sakata
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The invention provides a piezoelectric film having a large piezoelectric property, and a piezoelectric element, a liquid discharge head and a liquid discharge apparatus utilizing the same. The piezoelectric film is formed by an epitaxial oxide of <100> orientation having at least a tetragonal crystal structure, in which the oxide is a perovskite type composite oxide represented by a general formula ABO3 and contains at least domains C, D and E of [100] orientation having mutual deviation in crystal direction, where the angular deviation between [100] directions in domains C and D, in domains D and E, in domains C and E and in domains D and E are respectively 5° or less, 5° or less, 0.3° or less, and 0.3° or more, and the angular deviation between [001] directions in domains C and E and in domains D and E are respectively 1.0° or more, and 1.0° or more.
A piezoelectric member of an epitaxial oxide of <100> orientation having at least a tetragonal crystal structure, constituted of a perovskite type composite oxide represented by a general formula ABO3, which comprises at least domains C, D and E of [100] orientation having a deviation in crystal direction one another,
Dependencies are inferred from the claim text.