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US 7,622,850 B2Granted
Piezoelectric device, piezoelectric actuator, piezoelectric pump, inkjet recording head, inkjet printer, surface acoustic wave device, thin-film piezoelectric resonator, frequency filter, oscillator, electronic circuit, and electronic instrument
AssigneeSeiko Epson Corporation
InventorsSetsuya Iwashita, Takeshi Kijima, Koji Ohashi
Life of this patent
Estimating the term…
Abstract
A piezoelectric device includes: a substrate; a first conductive layer formed over the substrate, the first conductive layer including at least one buffer layer formed of a (001) preferentially oriented lanthanum-based layered perovskite compound; a piezoelectric layer formed over the first conductive layer and including a piezoelectric having a perovskite structure; and a second conductive layer electrically connected with the piezoelectric layer.
Claims12
A piezoelectric device comprising:
- a first conductive layer including at least one buffer layer formed of a (001) preferentially oriented lanthanum-based layered perovskite compound;
- a piezoelectric layer formed over the first conductive layer, the piezoelectric layer having a perovskite structure;
- and
- a second conductive layer formed over the piezoelectric layer.
1 more element
Dependencies are inferred from the claim text.