Method and device for precisely resisting and moving high load
AssigneeJapan Science and Technology Agency
InventorHideki Kawakatsu
Life of this patent
Estimating the term…
Abstract
A precise and high load resistance moving method to perform fine movement positioning of the moving body, by fixing a piezoelectric element which generates a shear deformation, to a bottom surface of a wedge-shaped moving element placed on a base, and deforming the piezoelectric element by driving the piezoelectric element with drive pulses to move the wedge-shaped moving element along a first axis in which the wedge-shaped moving element drives into or away from a moving body to move the moving body along a second axis in upward and downward direction relative to the base. Also, a precise and high load resistance moving device including a wedge-shaped moving element, a pulse source, and a moving body vertically movable in upward or downward direction relative to the base.
Claims10
A precise and high load resistance moving method comprising:
- (a) fixing a piezoelectric element which generates a shear deformation, to a bottom surface of a wedge-shaped moving element placed on a base;
- and
- (b) deforming the piezoelectric element by driving the piezoelectric element with drive pulses to move the wedge-shaped moving element along a first axis in which the wedge-shaped moving element drives into or away from a moving body to move the moving body along a second axis in upward and downward direction relative to the base, to perform fine movement positioning of the moving body.
A precise and high load resistance moving device comprising:
- (a) a wedge-shaped moving element arranged on a base in a horizontal direction of a fixed body, and to a bottom surface, a piezoelectric element which generates a shear deformation is fixed,
- (b) a pulse source for driving a piezoelectric element, and
- (c) a moving body vertically movable in upward or downward direction relative to the base, wherein
- a bottom surface of the wedge-shaped moving element is fixed to the piezoelectric element, the piezoelectric element being configured to deform, when driven with drive pulses from the pulse source, to move the wedge-shaped moving element drives the moving body to move the moving body along the first axis in the upward or downward direction relative to the base.
Dependencies are inferred from the claim text.