Linear motor and linear moving stage device
AssigneeToshiba Kikai Kabushiki Kaisha
InventorTsuyoshi Moriyama
Life of this patent
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Abstract
A linear motor for giving thrust to a movable unit capable of linearly moving freely in one direction with respect to a stator, comprising a plurality of permanent magnets arranged on the base side by lining up a positive pole and a negative pole in the one direction; and a plurality of flat shaped coils arranged along the arrangement direction of permanent magnets and fixed as armatures to said movable unit side so as to face the permanent magnets by leaving an electromagnetic gap; wherein a coil fixed surface on the stage side is provided a recessed portion for defining an air gap between the coil fixed surface and said coils.
Claims14
A linear motor for providing thrust to a movable unit capable of linearly moving freely in one direction with respect to a stator, comprising:
- a plurality of permanent magnets arranged on the stator side by lining up a positive pole and a negative pole in said one direction;
- and
- a plurality of flat shaped coils arranged along the arrangement direction of permanent magnets and fixed to said movable unit side so as to face the permanent magnets at an electromagnetic gap;
- wherein said movable unit is made of nonmagnetic and thermal conductive material and has a recessed portion at a surface facing the plurality of flat shaped coils to define an air gap between the coils and the movable unit,
- wherein each flat shaped coil comprises a plate shaped reinforcement member of nonmagnetic material and a flat coil member wound around the reinforcement member;
- wherein two side portions of each coil member of each flat shaped coil are substantially fixed to non-recessed portions of the movable unit by thermal conductive fixing member;
- and
- wherein a depth of the recessed portion of the movable unit is restricted, so that a surface magnetic flux on said facing surface generated by a magnetic field of facing magnets becomes 1000 gauss or lower.
A linear moving stage device comprising a base, a stage of nonmagnetic material and built to be able to linearly move freely in one direction with respect to the base, and a linear motor that provides thrust in said one direction to the stage,
- said linear motor comprising:
- a plurality of permanent magnet arranged on the base by lining up a positive pole and a negative pole in said one direction, and
- a plurality of flat shaped coils arranged along the arrangement direction of permanent magnets and fixed as armatures to said stage so as to face the permanent magnets at an electromagnetic gap;
- wherein the stage is made of nonmagnetic and thermal conductive material and has a recessed portion at a surface facing the plurality of flat shaped coils to define an air gap between the coils and the stage;
- wherein each flat shaped coil comprises a plate shaped reinforcement member of nonmagnetic material and a flat coil member wound, around the reinforcement member,
- wherein two side portions of each coil member of each flat shaped coil are substantially fixed to non-recessed portion of the stage by thermal conductive fixing member, and
- wherein a depth of the recessed portion of the stage is restricted, so that a surface magnetic flux on said facing surface generated by a magnetic field of facing magnets becomes 1000 gauss or lower.
Dependencies are inferred from the claim text.