Seek-scan probe (SSP) including see-saw scan probe with redundant tip
AssigneeIntel Corporation
InventorTsung-Kuan Allen Chou
Life of this patent
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Abstract
An apparatus comprising a substrate having a probe suspension formed thereon, a see-saw probe coupled to the probe suspension, the see-saw probe including first and second ends, with a tip projecting from a side of the first end, and an actuation electrode formed on the substrate, the actuation electrode positioned to exert a force upon the second end of the see-saw probe. A process comprising forming a probe suspension on a substrate, coupling a see-saw probe to the probe suspension, the see-saw probe including first and second ends, with a tip projecting from a side of the first end, and forming an actuation electrode on the substrate, the actuation electrode positioned to exert a force upon the second end of the see-saw probe.
Claims17
An apparatus comprising:
- a first stage comprising:
- a substrate having a probe suspension formed thereon;
- a see-saw probe coupled to the probe suspension, the see-saw probe including first and second ends, with a tip projecting from a side of the first end;
- and
- an actuation electrode formed on the substrate, the actuation electrode positioned to exert a force upon the second end of the see-saw probe.
A system comprising:
- a processor;
- a first memory coupled to the processor, wherein the memory is selected from a group consisting of random access memory (RAM), dynamic random access memory (DRAM), synchronous random access memory (SRAM) and synchronous dynamic random access memory (SDRAM);
- and
- a second memory coupled to the processor, the second memory comprising:
- a first stage including:
- a substrate having a probe suspension formed thereon,
- a see-saw probe coupled to the probe suspension, the see-saw probe including first and second ends, with a tip projecting from a side of the first end, and
- an actuation electrode formed on the substrate, the actuation electrode positioned to exert a force upon the second end of the see-saw probe;
- and
- a second stage including:
- a substrate having a storage media deposited thereon, and
- an electrode formed on the substrate and positioned between the substrate and the storage media, wherein the second stage is positioned facing the first stage, such that the tip contacts the storage media overlying the electrode when the actuation electrode is activated.
Dependencies are inferred from the claim text.