Aluminum nitride sintered compact
AssigneeSumitomo Electric Industries, Ltd.
InventorsYasushi Itoh, Sadamu Ishidu, Yasushi Tsuzuki
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Abstract
Provided is an aluminum nitride sintered body having a larger area and a smaller thickness as compared to the conventional art, wherein the aluminum nitride sintered body has flatness with controlled warpage and/or waviness height. Methods of producing such sintered body, and further a metallized substrate and a heater using such sintered body are also provided. An aluminum nitride substrate 1 has a maximum length of 320 mm or more, a thickness of more than 0 mm and 2 mm or less, a warpage of 0 μm/mm or more and less than 2 μm/mm, and a local waviness height of 0 μm or more and 100 μm or less.
Claims7
An aluminum nitride sintered body having a maximum length of 320 mm or more, a thickness of more than 0 mm and 2 mm or less, a warpage of 0 μm/mm or more and less than 1 μm/mm, and a local waviness height of 0 μm or more and 50 μm or less after a sintering step is finished.
A metallized substrate comprising:
- a plate-shaped substrate made of an aluminum nitride sintered body having a maximum length of 320 mm or more, a thickness of more than 0 mm and 2 mm or less, a warpage of 0 μm/mm or more and less than 1 μm/mm, and a local waviness height of 0 μm or more and 50 μm after a sintering step is finished;
- and
- an electrically conductive metallized layer that is formed on at least a part of the substrate.
A heater comprising:
- a metallized substrate comprising a plate-shaped substrate made of an aluminum nitride sintered body having a maximum length of 320 mm or more, a thickness of more than 0 mm and 2 mm or less, a warpage of 0 μm/mm or more and less than 1 μm/mm, and a local waviness height of 0 μm or more and 50 μm or less after a sintering step is finished, an electrically conductive metallized layer formed on at least a part of the substrate;
- an electrode part arranged on the metallized layer and connected to the metallized layer;
- and
- an insulating layer arranged on the metallized layer.
Dependencies are inferred from the claim text.