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US 7,622,193 B2Granted
Coated substrates and methods for their preparation
AssigneeDow Corning Corporation
InventorsMark Loboda, Steven Snow, William Weidner, Ludmil Zambov
Life of this patent
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Abstract
Coated substrates containing a barrier layer comprising hydrogenated silicon oxycarbide having a density of at least 1.6 g/cm3 and methods of preparing the coated substrates.
Claims7
A coated substrate, comprising:
- a substrate;
- and
- a barrier layer on the substrate, wherein the barrier layer comprises hydrogenated silicon oxycarbide having a density of at least 1.6 g/cm3 and a formula SimOnCpHq wherein m has a value of from 10 to 33 atomic %, n has a value of from 1 to 66 atomic %, p has a value of from 1 to 66 atomic %, q has a value of from 0.1 to 60 atomic %, and m+n+p+q=100 atomic %, further comprising a buffer layer on the barrier layer, wherein the buffer layer comprises hydrogenated silicon oxycarbide having a density less than 1.6 g/cm3.
A coated substrate, comprising:
- a substrate;
- a buffer layer on the substrate, wherein the buffer layer comprises hydrogenated silicon oxycarbide having a density less than 1.6 g/cm3;
- and
- a barrier layer on the buffer layer, wherein the barrier layer comprises hydrogenated silicon oxycarbide having a density of at least 1.6 g/cm3 and a formula SimOnCpHq wherein m has a value of from 10 to 33 atomic %, n has a value of from 1 to 66 atomic %, p has a value of from 1 to 66 atomic %, q has a value of from 0.1 to 60 atomic %, and m+n+p+q=100 atomic %.
1 more element
Dependencies are inferred from the claim text.