Reactive metal sources and deposition method for thioaluminate phosphors
AssigneeIfire IP Corporation
InventorsYue (Helen) Xu, Alexander Kosyachkov, Guo Liu, Xingwei Wu, Joe Acchione
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Abstract
A physical vapor deposition method for the deposition of thioaluminate phosphor compositions includes providing one or more source materials including an intermetallic barium aluminum compound, a barium aluminum alloy or a protected barium metal, providing an activator species and effecting deposition of the one or more source materials and activator species as a phosphor composition on a selected substrate. The method allows for the deposition of blue thin film electroluminescent phosphors with high luminance and colors required for TV applications.
Claims45
A physical vapour deposition method for the deposition of thioaluminate phosphor compositions, the method comprising:
- providing one or more source materials selected from the group consisting of an intermetallic barium aluminum compound, a barium aluminum alloy and a protected barium metal;
- providing an activator species;
- effecting physical vapour deposition of one or more source materials and said activator species in a sulfur vapour atmosphere as a thioaluminate phosphor composition on a selected substrate;
- and
- wherein the protected barium metal is a composite of a barium aluminum alloy and an aluminum metal or a barium metal covered with a volatile passivating film.
A physical vapour deposition method for the deposition of thioaluminate phosphor compositions, the method comprising:
- providing one or more source materials selected from the group consisting of an intermetallic barium aluminate compound, a barium aluminum alloy, a protected barium metal and combinations thereof;
- providing an activator species to said one or more source materials or separately;
- effecting physical vapour deposition in a sulfur vapour atmosphere of said source materials and said activator species as a thioaluminate phosphor composition on a selected substrate;
- and
- wherein the protected barium metal is a composite of a barium aluminum alloy and an aluminum metal or a barium metal covered with a volatile passivating film.
A physical vapour deposition method for the deposition of a barium thioaluminate phosphor composition, the method comprising:
- providing BaAl4 as a source material and an activator species;
- and
- effecting vapour deposition of said source material and said activator species as a barium thioaluminate phosphor composition on a selected substrate in a sulfur vapour atmosphere.
Dependencies are inferred from the claim text.