Ozonated water flow and concentration control apparatus and method
AssigneeMKS Instruments, Inc.
InventorsJens Fittkau, Johannes Seiwert, Christiane Gottschalk
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Abstract
The invention features an apparatus and a method for supplying ozonated water to more than one process tool. Ozonated water of a first concentration received from an ozonated water generator and water received from a source are mixed to produce ozonated water of a second concentration. The ozonated water of a second concentration is supplied to a first process tool. Ozonated water from the ozonated water generator is supplied to a second process tool while supplying the ozonated water of the second concentration to the first process tool.
Claims18
A control unit for mixing fluids under pressure for process tools to avoid outgassing of dissolved gasses in the fluids, the control unit comprising:
- a first fluid input port for receiving a first fluid including dissolved gas, the first fluid having a first concentration and first flow to be supplied to a first process tool;
- a second fluid input port for receiving a second fluid having a second flow and second concentration;
- and
- at least one valve for controlling at least one of flow or concentration of the first fluid or second fluid to produce a third fluid including dissolved gas, the third fluid having a third flow and third concentration to be supplied to a second process tool, wherein the control unit is capable of performing mixing of the first and second fluids under pressure to avoid outgassing of the dissolved gas in the first or third fluids.
A control unit for mixing fluids under pressure for process tools to avoid outgassing of dissolved gasses in the fluids, the control unit comprising:
- a means for receiving a first fluid including dissolved gas, the first fluid having a first concentration and first flow to be supplied to a first process tool;
- a means for receiving a second fluid having a second flow and second concentration;
- and
- a means for controlling at least one of flow or concentration of the first fluid or second fluid to produce a third fluid including dissolved gas, the third fluid having a third flow and third concentration to be supplied to a second process tool, wherein the control unit is capable of performing mixing of the first and second fluids under pressure to avoid outgassing of the dissolved gas in the first or third fluids.
A control unit for mixing fluids under pressure to avoid outgassing of dissolved gasses in the fluids, the control unit comprising:
- a first fluid input port for receiving a first fluid including dissolved gas, the first fluid having a first concentration and first flow to be supplied to a first piece of equipment;
- a second fluid input port for receiving a second fluid having a second flow and second concentration;
- and
- at least one valve for controlling at least one of flow or concentration of the first fluid or second fluid to produce a third fluid including dissolved gas, the third fluid having a third flow and third concentration to be supplied to a second piece of equipment, wherein the control unit is capable of performing mixing of the first and second fluids under pressure to avoid outgassing of the dissolved gas in the first or third fluids.
Dependencies are inferred from the claim text.