Gate valve and vacuum container for semiconductor processing system

A gate valve for a semiconductor processing system, the gate valve comprising:

• a housing forming a plurality of passages arrayed in a first direction, the passages respectively having ports facing a first predetermined side in a second direction perpendicular to the first direction;
• valve seats respectively disposed at the ports, the valve seats being respectively disposed at gradually set back positions in the second direction, as being closer to a second predetermined side in the first direction;
• valve plates configured to selectively engage with the valve seats by sliding in the first direction to respectively open/close the ports, the valve plates being arrayed in the second direction correspondingly to positions of the valve seats in the second direction;
• and
• actuating mechanisms respectively provided for the valve plates, each of the actuating mechanisms being configured to slide a corresponding one of the valve plates between a first position to close a corresponding one of the ports and a second position to open the corresponding one of the ports.

A vacuum container for a semiconductor processing system, the vacuum container comprising:

• a container body forming a plurality of vacuum chambers arrayed in a first direction;
• and
• a first gate valve disposed at a first end of the container body and configured to open/close the vacuum chambers,
• where the first gate valve comprises
• a housing forming a plurality of passages arrayed in the first direction and respectively communicating with the vacuum chambers, the passages respectively having ports facing a first predetermined side in a second direction perpendicular to the first direction,
• valve seats respectively disposed at the ports, the valve seats being respectively disposed at gradually set back positions in the second direction, as being closer to a second predetermined side in the first direction,
• valve plates configured to selectively engage with the valve seats by sliding in the first direction to respectively open/close the ports, the valve plates being arrayed in the second direction correspondingly to positions of the valve seats in the second direction, and
• actuating mechanisms respectively provided for the valve plates, each of the actuating mechanisms being configured to slide a corresponding one of the valve plates between a first position to close a corresponding one of the ports and a second position to open the corresponding one of the ports.