Carbon film laminate and method for production thereof, and VOC removing device
AssigneeNGK Insulators, Ltd.
InventorsKazuyuki Kaigawa, Toshihiro Tomita, Manabu Yoshida, Masamichi Obata
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Abstract
A carbon film laminate 1 having a porous substrate 6 formed of a plurality of particles and a carbon film 2 provided on a surface of the porous substrate 6, wherein the porous substrate 6 includes a surface layer 3 which is in contact with the carbon film 2 and which is formed of particles 3a having a mean particle size of 0.01 to 0.11 μm, and a porous body 5 formed of particles having a mean particle size differing from that of the particles 3a forming the surface layer 3. The invention provides a carbon film laminate which does not generate cracks and pinholes of the carbon film and which is suitable for producing thin film thereof.
Claims22
A carbon film laminate having a porous substrate formed of a plurality of particles and a carbon film provided on a surface of the porous substrate,
- wherein the porous substrate comprises a surface layer which is in contact with the carbon film and which is formed of particles having a mean particle size of 0.02 to 0.11 μm, and a mean pore size of 0.01 to 0.05 μm, and a porous body formed of particles having a mean particle size differing from that of the particles forming the surface layer.
A method for producing a carbon film laminate comprising
- providing a surface layer on a surface of a porous body formed of a plurality of particles, the surface layer being formed of particles having a mean particle size of 0.01 to 0.11 μm and having a mean particle size differing from that of the particles forming the porous body, to thereby form a porous substrate having a porous body and a surface layer;
- providing a polyimide resin layer on the surface layer of the porous substrate, to thereby form a polyimide resin layer-provided porous substrate;
- and
- thermally treating the polyimide resin layer-provided porous substrate so as to carbonize polyimide resin, to thereby form a carbon film laminate.
A method for producing a carbon film laminate comprising a step of thermally treating a polyimide resin layer-provided porous substrate having a porous substrate and a polyimide resin layer formed on the porous substrate, to thereby carbonize polyimide resin to form a carbon film, wherein the polyimide resin layer-provided porous substrate is thermally treated under such thermal treatment conditions that percent shrinkage of the polyimide resin after initiation of shrinkage is adjusted to a predetermined value on the basis of the relationship between percent shrinkage of the polyimide resin per se as determined after initiation of shrinkage during thermal treatment of the resin and thermal treatment conditions therefor, whereby the carbon film has a controlled pore size.
Dependencies are inferred from the claim text.