X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging

A dual-axis sensor for measuring X and Y components of angular velocity in an X-Y sensor plane, the dual-axis sensor comprising:

• A) a first subsensor for measuring the X component of angular velocity, the first subsensor comprising:
• a) a first sensing subassembly comprising:
• i) a substantially planar first frame parallel to said plane;
• ii) a first mass disposed in said plane;
• iii) a second mass disposed in said plane laterally to said first mass;
• and
• iv) a first linkage within said frame and connected to said frame, wherein said linkage is connected to said first mass and to said second mass and wherein said first linkage constrains said first and second masses to move in opposite directions perpendicular to said plane;
• b) a first actuator for driving a first portion of said first subassembly into oscillation at a drive frequency;
• and
• c) a first transducer for sensing motion of a second portion of said first subassembly responsive to the X component of angular velocity;
• wherein said first linkage further comprises:
• a center plate connected to said frame and connected to and in between said first and second masses, wherein said center plate is rotatable about a center axis of rotation;
• a first edge plate connected to a base via a drive anchor portion of the base and to said first mass, wherein said first edge plate is rotatable about a first axis of rotation;
• and a second edge plate connected to the base via a drive anchor portion of the base and to said second mass, wherein said second edge plate is rotatable about a second axis of rotation;
• wherein said center, first and second axes of rotation are parallel to each other and are also parallel to said sensor plane;
• and
• B) a second subsensor for measuring the Y component of angular velocity, the second subsensor comprising:
• a) a second sensing subassembly comprising:
• i) a substantially planar second frame parallel to said plane;
• ii) a third mass disposed in said plane;
• iii) a fourth mass disposed in said plane laterally to said third mass;
• and
• iv) a second linkage within said second frame and connected to said second frame, wherein said second linkage is connected to said third mass and to said fourth mass and wherein said second linkage constrains said third and fourth masses to move in opposite directions perpendicular to said plane;
• b) a second actuator for driving a first portion of said second subassembly into oscillation at a drive frequency;
• and
• c) a second transducer for sensing motion of a second portion of said second subassembly responsive to the Y component of angular velocity, wherein said second linkage further comprises:
• a second center plate connected to said second frame and connected to and in between said third and fourth masses, wherein said second center plate is rotatable about a second center axis of rotation;
• a third edge plate connected to a base via a drive anchor portion of the base and to said third mass, wherein said third edge plate is rotatable about a third axis of rotation;
• and a fourth edge plate connected to the base via a drive anchor portion of the base and to said fourth mass, wherein said fourth edge plate is rotatable about a fourth axis of rotation;
• wherein said second center, third and fourth axes of rotation are parallel to each other and are also parallel to said sensor plane.