Method of producing a probe with a trapezoidal contactor

A method for attaching a base end of a probe to a supporting column placed on a card shaped substrate, comprising the steps of:

• installing the base end of the probe, having a trapezoidal contactor and accommodated in a probe array, on an attaching surface of the supporting column on the card shaped substrate;
• and
• fixing the base end of the probe to the supporting column by using an ultrasonic bonder having a leading end equipped with a protrusion,
• wherein the probe array includes a second film-shaped supporting body having elasticity;
• and
• a plurality of probes adhered onto one surface of the second film-shaped supporting body, each probe including a beam and a trapezoidal contactor, an inner part of the contactor being essentially filled with one or more metals,
• wherein the beam has a leading end portion, an intermediate portion and the base end portion, the leading end portion being a portion for making a contact with a test subject via the contactor, and the contactor is installed to be disposed at the leading end portion of the beam, a top portion of the contactor being embedded in the second film-shaped supporting body,
• wherein the step of fixing the base end of the probe to the supporting column is performed by pressing the leading end of the ultrasonic bonder against an upper side of the base end of the probe, and
• wherein the protrusion of the leading end of the ultrasonic bonder has a crossing shape, a cross section of the protrusion being substantially semicircular, and the beam of the probe is bent toward the contractor by fixing the base end of the probe to the supporting column by using the ultrasonic bonder.